_ Department (Nano and Micro Electromechanical MEMS )
Nanoelectromechanical MEMS devices and a reviewof high-aspect ratio (LIGA-like and LIGA) technologies - an explanation of surface and bulk (BULK)
Researcher and author: Dr. ( Afshin Rashid)
Note: Nano- and micro- electro-mechanical systems (MEMS ) and nano-micromachining ( BULK) technology, in addition to LIGA-like and LIGA (high-aspect ratio) technologies , are the most developed manufacturing methods.
In the internal structure of (nano- and micro- electro-mechanical MEMS ) systems, silicon is the primary substrate material used in the nano-microelectronics industry. A crystal mold ( a solid cylinder 300nm in diameter and 100nm in length) of silicon with a very high purity is crystallized and cut to the desired thickness, and then polished using mechanical and chemical polishing technologies . The properties of the electromagnetic and mechanical plates are the direction and location of crystal crystallization and its expected impurities.
Nano- and Micro- Electro-Mechanical Systems (MEMS ) and Nano-Micro technology is a technological process based on nanoelectronics that is used to create very small integrated systems and devices that are composed of electrical and mechanical elements. They are fabricated using single-step processing techniques and in sizes ranging from less than micrometers to millimeters. These devices or systems have the ability to sense, control, and actuate down to the microscale and even on macroscales. Reality MEMS and nano-micro technology is used to design, engineer, manufacture and operate a wide range of specialized parts including ICs . Manufacturing consumer and industrial products (by combining micromechanical technology and silicon microelectronics ) The techniques used have a dramatic impact on our lives. If fabrication is also the microfabrication of semiconductors. MEMS and nano-micro technology is a fabrication technology, a paradigm for designing and realizing complex mechanical systems and devices as well as their integrated electronics using single-step fabrication techniques . MEMS fabrication techniques enable components and devices to be manufactured with increased efficiency and capability , with the usual advantages of reducing physical size, volume, weight, and cost, and providing a basis for manufacturing products not possible by other methods. The intrinsic order of MEMS technology and its micromachining techniques, as well as the diversity of its applications, have led to the unprecedented limitation of MEMS devices in previously untapped fields (e.g., biology and microelectronics). These factors make MEMS far more pervasive than IC microchip technology .
Conclusion:
MEMS and nanotechnology - Micromachining of the surface and bulk (BULK), plus high-aspect ratio (LIGA-like and LIGA) technologies are the most developed fabrication methods.
Researcher and author: Dr. ( Afshin Rashid)
Specialized PhD in Nano-Microelectronics