Department of systems (nano and microelectric and mechanical MEMS )
A description of (nano and micro-electric and mechanical MEMS ) systems
Researcher and author: Dr. ( Afshin Rashid)
Note: MEMS that integrates moving micro-devices (actuators and sensors), energy-radiating micro-devices (such as antennas, micro-structures and coils), micron-scale actuator sensor circuits and control processing circuits. It is widely used.
Nano- and micro-electromechanical systems and precision instruments and measuring devices ( various states of the industry), high-performance computers that are used in the design of software and effective computing environment . The design of micro-nano scale systems, subsystems , tools and structures without unifying them and regular cooperation, is ready for the integration of new phenomena and complex processes. Micro-electromechanical systems (MEMS) is the integration of mechanical elements, sensors, actuators and nanoelectronic devices on a silicon base by means of manufacturing technology in nano-micron dimensions. As long as the electronic devices are made for use in the process of integrated circuits (IC) (such as components), "BICMOS, Bipolar, CMOS micro-mechanical fabrication" for use in micro-machining processes, compatible and appropriate to be selectively part by part with silicon wafers or adding new construction layers to form mechanical and electrical devices. Mechanical is used, they are made.
Microelectronic integrated circuits can be considered as the mastermind of a system, and MEMS augments this decision-making capability with eyes and arms to allow microsystems to measure the environment by mechanical, thermal, biological, chemical, optical measurements. and collect magnetically. The electronics then use the information received from the sensors and through some decision making commands the arms to react by moving, positioning, adjusting, pumping and filtering . As a result, the environment is controlled for the desired requirements . At each level of the hierarchy of design, the efficiency of the system in the realm of its behavior for evaluation, optimization and Correction of the optimization and combination process is used to find new solutions. ICs must provide MEMS performance characteristics such as device control and electromechanical structures based on electromagnetism , input-output channels, analog-to-digital and digital-to-analog conversions, filtering , data utilization, etc.
Conclusion :
As MEMS devices are made for use in batch fabrication methods such as integrated circuits , a new level of performance, reliability, and dexterity can be achieved on a small silicon chip at a relatively low cost .
Researcher and author: Dr. ( Afshin Rashid)
Specialized doctorate in nano-microelectronics