_ Department of systems (nano and microelectric and mechanical MEMS )
MEMS and high-aspect ratio (LIGA-like) or (high-aspect ratio) nanotechnologies - a description of the surface and body (BULK)
Researcher and author: Dr. ( Afshin Rashid)
Note: (nano and micro-electrical and mechanical MEMS ) systems and nano-micromachining ( bulk) surface and trunk technology, plus high-aspect ratio technologies (LIGA-like) or (high-aspect ratio) are the most developed manufacturing methods.
In the internal structure of systems (nano and microelectric and mechanical MEMS ), silicon is the material under the first layer, which is used in the nano-microelectronics industry . A crystal mold ( a solid cylinder of 300 nm in diameter and 100 nm in nanometer length) is crystallized from silicon with a very high purity percentage and is cut to the desired thickness, and then it is polished by means of mechanical and chemical polishing technologies . The properties of electromagnetic and mechanical tablets are based on the direction and place of crystallization of the crystal and its expected impurities.
Systems (nano and micro-electromechanical MEMS ) and nano-micro technology is a technological process based on nano-electronics that is used to create very small integrated systems and devices that are composed of electrical and mechanical elements . They are classified using single-step operation techniques and in sizes between micrometers and millimeters. These devices or systems have the ability to sense and control and actuate up to the micro scale and are even used on the macro scale (very large). The reality of MEMS and nano-micro technology for designing and engineering and making The administration of special tasks uses a wide and diverse range of parts that include IC . Making consumer and industrial products (by combining micro-mechanical technology and silicon micro-electronics ) the techniques used have a wonderful effect on our lives. If micro fabrication is also semiconductors. MEMS and nano-micro technology is a structural technology, an example for designing and creating complex mechanical systems and devices as well as their integrated electronics that use single-step manufacturing techniques . MEMS manufacturing techniques enable that Components and devices with increased efficiency and capability can be produced, along with common advantages such as reducing physical size, volume, weight, and cost, and providing a basis for manufacturing products that cannot be manufactured by other methods. This is the reality of internal order of MEMS technology and its micromachining techniques. As well as the diversity of its applications leads to an unprecedented range of MEMS devices in front of previously isolated fields (for example, biology and microelectronics), these factors make MEMS far more widespread than IC microchip technology .
Conclusion :
MEMS and nano technology - Micromachining (Micromachining) surface and body (BULK), plus high-aspect ratio (LIGA-like) or (high-aspect ratio) technologies are the most developed manufacturing methods.
Researcher and author: Dr. ( Afshin Rashid)
Specialized doctorate in nano-microelectronics